V, S. . D.C. Magnetron Sputtering Coating on Trenches. Journal of Manufacturing Engineering, [S. l.], v. 16, n. 1, p. 029–031, 2021. DOI: 10.37255/jme.v16i1pp029-031. Disponível em: http://smenec.org/index.php/1/article/view/21. Acesso em: 28 mar. 2024.