A STUDY ON PROCESS LIMITATIONS AND SCOPES OF MICRO-MANUFACTURING TECHNIQUES FOR THE FABRICATION OF MEMS TORSIONAL ACTUATORS. Journal of Manufacturing Engineering, [S. l.], v. 8, n. 1, p. 048–052, 2013. Disponível em: https://smenec.org/index.php/1/article/view/334. Acesso em: 22 aug. 2025.